Author:
Su Yu-Hsuan,Huang Yu-Chen,Tsai Liang-Chun,Chang Yao-Wen,Banerjee Shayak
Funder
Genesys Logic
IBM
MediaTek
Taiwan Semiconductor Manufacturing Company (TSMC)
Academia Sinica
Ministry of Science and Technology (MOST) of Taiwan
National Taiwan University (NTU)
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Computer Graphics and Computer-Aided Design,Software
Cited by
31 articles.
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1. A self-training end-to-end mask optimization framework based on semantic segmentation network;Integration;2024-05
2. RL-OPC: Mask Optimization With Deep Reinforcement Learning;IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2024-01
3. DevelSet: Deep Neural Level Set for Instant Mask Optimization;IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2023-12
4. CTM-SRAF: Continuous Transmission Mask-Based Constraint-Aware Subresolution Assist Feature Generation;IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2023-10
5. A GPU-Enabled Level-Set Method for Mask Optimization;IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2023-02