A modular MEMS electromagnetic actuator for use in a hearing instrument-Reference-Cited by-同舟云学术

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A modular MEMS electromagnetic actuator for use in a hearing instrument

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Container-title:Proceedings of the 43rd IEEE Midwest Symposium on Circuits and Systems (Cat.No.CH37144)
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Author:

Chowdhury S.,Ahmadi M.,Jullien G.A.,Miller W.C.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/7554/20582/00951629.pdf?arnumber=951629

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Simulation of comb drive actuators;AIP Conference Proceedings;2024

2. Multi-layered [Au/Si3N4/SiO2] thermal actuator realization using metal passivated TMAH micro-machining;Engineering Research Express;2019-07-11

3. Extending the traveling range with a cascade electrostatic comb-drive actuator;Journal of Micromechanics and Microengineering;2007-12-03

4. Development of Vertical Electrostatic Comb-Drive Actuator Using Magnified Cascade Configuration;Japanese Journal of Applied Physics;2007-10-09

5. Modeling and verification of the double frequency effect using a MEMS device;Microsystem Technologies;2006-05-12

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