Development of Vertical Electrostatic Comb-Drive Actuator Using Magnified Cascade Configuration
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference11 articles.
1. Extending the travel range of analog-tuned electrostatic actuators
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Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Fringing capacitance and tolerance of DRIE effect on the performance of bulk silicon comb-drive actuator;Microsystem Technologies;2016-06-16
2. Non-initial overlap bulk silicon comb-drive actuator with low-voltage and large-displacement;MATEC Web of Conferences;2016
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