Multi-layered [Au/Si3N4/SiO2] thermal actuator realization using metal passivated TMAH micro-machining
Author:
Publisher
IOP Publishing
Subject
General Engineering
Link
https://iopscience.iop.org/article/10.1088/2631-8695/ab2659/pdf
Reference19 articles.
1. A CMOS z-axis capacitive accelerometer with comb-finger sensing
2. Micromachined inertial sensors
3. Suitability of MEMS Accelerometers for Condition Monitoring: An experimental study
4. Gimbal-Less Monolithic Silicon Actuators for Tip–Tilt–Piston Micromirror Applications
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Integrated Fabrication Process of Si Microcantilever Using TMAH Solution With Planar Molybdenum Mask;Journal of Microelectromechanical Systems;2023-06
2. Reliability Analysis of Thermally Actuated MEMS Micromirror;Lecture Notes in Electrical Engineering;2022-09-12
3. Modeling of Electrothermal Microactuator;Computational Mathematics, Nanoelectronics, and Astrophysics;2021
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