Numerical simulation for air flow in the mini-environment and SMIF enclosure-Reference-Cited by-同舟云学术

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Numerical simulation for air flow in the mini-environment and SMIF enclosure

Published:2003-02 Issue:1 Volume:16 Page:60-67
ISSN:0894-6507
Container-title:IEEE Transactions on Semiconductor Manufacturing
language:en
Short-container-title:IEEE Trans. Semicond. Manufact.

Author:

Huan-Ruei Shiu ,Hsiao-Yi Huang ,Sih-Li Chen ,Ming-Tsun Ke

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx5/66/26442/01177331.pdf?arnumber=1177331

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Study on contamination control in a minienvironment inside clean room for yield enhancement based on particle concentration measurement and airflow CFD simulation;Building and Environment;2010-04

2. Simulation and testing of pollutant dispersion during preventive maintenance in a cleanroom;Building and Environment;2009-12

3. Spatial and Temporal Distributions of a Gaseous Pollutant During Simulated Preventive Maintenance and Pipe Leaking Events in a Working Cleanroom;IEEE Transactions on Semiconductor Manufacturing;2009-08

4. Prediction and Evaluation of Cleanliness Levels Inside a Mini-Environment by Measuring Mean Air-Age and Effective Flow Rate;IEEE Transactions on Semiconductor Manufacturing;2008-05

5. Evaluation and Prediction of Cleanliness Level in the Mini-Environment System Using Local Mean Air-Age;Transactions of the Korean Society of Mechanical Engineers B;2007-05-01

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