Simulation and testing of pollutant dispersion during preventive maintenance in a cleanroom-Reference-Cited by-同舟云学术

Simulation and testing of pollutant dispersion during preventive maintenance in a cleanroom

Published:2009-12 Issue:12 Volume:44 Page:2319-2326
ISSN:0360-1323
Container-title:Building and Environment
language:en
Short-container-title:Building and Environment

Author:

Shih Hui-Ya,Huang Shih-Hsuan,Li Shou-Nan,Chen Sheng-Chieh,Tsai Chuen-Jinn

Publisher

Elsevier BV

Subject

Building and Construction,Geography, Planning and Development,Civil and Structural Engineering,Environmental Engineering

Reference23 articles.

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4. Kanzawa K, Kitano J. A semiconductor device manufacturer's efforts controlling and evaluating atmospheric pollution. IEEE/SEMI Advanced Semiconductor Manufacturing Conference; 1995. p.:190–193.

5. Case Study of Micro-Contamination Control;Li;Aerosol and Air Quality Research,2007

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