Author:
Noh Kwang-Chul,Kim Hyuk-Soon,Oh Myung-Do
Subject
Building and Construction,Geography, Planning and Development,Civil and Structural Engineering,Environmental Engineering
Reference22 articles.
1. Cleanroom technology: fundamentals of design, testing and operation;Whyte,2001
2. Simulation and testing of pollutant dispersion during preventive maintenance in a cleanroom;Shih;Building and Environment,2009
3. A numerical study on airflow and dynamic cross-contamination in the super cleanroom for photolithography process;Noh;Building and Environment,2005
4. Costing small cleanrooms;Yang;Building and Environment,2007
5. International Organization for Standardization (ISO). ISO 14644-7, cleanrooms and associate controlled environments-part 7: separation devices (clean air hoods, glove boxes, isolators and minienvironments); 2004.
Cited by
34 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献