A Low-Power HKMG CMOS Platform Compatible With Dram Node 2× and Beyond-Reference-Cited by-同舟云学术

A Low-Power HKMG CMOS Platform Compatible With Dram Node 2× and Beyond

Published:2014-08 Issue:8 Volume:61 Page:2935-2943
ISSN:0018-9383
Container-title:IEEE Transactions on Electron Devices
language:
Short-container-title:IEEE Trans. Electron Devices

Author:

Ritzenthaler Romain,Schram Tom,Spessot Alessio,Caillat Christian,Aoulaiche Marc,Cho Moon Ju,Noh Kyoung Bong,Son Yunik,Na Hoon Joo,Kauerauf Thomas,Douhard Bastien,Nazir Aftab,Chew Soon Aik,Milenin Alexey P.,Altamirano-Sanchez Efrain,Schoofs Geert,Albert Johan,Sebai Farid,Vecchio Emma,Paraschiv Vasile,Vandervorst Wilfried,Lee Sun-Ghil,Collaert Nadine,Fazan Pierre,Horiguchi Naoto,Thean Aaron Voon-Yew

Funder

imec¿s Core Partner Program

The imec Core CMOS program members, the imec pilot line and amsimec

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/16/6861490/06847699.pdf?arnumber=6847699

Cited by 16 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Enhanced Thermal Stability and Reduced Specific Contact Resistivity in Titanium-Based Ohmic Contact With an Ultra-Thin Molybdenum Interlayer;IEEE Electron Device Letters;2024-07

2. Compact thermally stable high voltage FinFET with 40 nm tox and lateral break-down >35 V for 3D NAND flash periphery application;Japanese Journal of Applied Physics;2024-02-12

3. Machine learning investigation of high-k metal gate processes for dynamic random access memory peripheral transistor;APL Materials;2024-02-01

4. FinFETs with Thermally Stable RMG Gate Stack for Future DRAM Peripheral Circuits;2022 International Electron Devices Meeting (IEDM);2022-12-03

5. High Performance Thermally Resistant FinFETs DRAM Peripheral CMOS FinFETs with V_TH Tunability for Future Memories;2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits);2022-06-12