Lock-In-Thermography, Photoemission, and Time-Resolved GHz Acoustic Microscopy Techniques for Nondestructive Defect Localization in TSV
Author:
Affiliation:
1. Center for Applied Microstructure Diagnostics, Fraunhofer Institute for Microstructure of Materials and Systems IMWS, Halle, Germany
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Electronic, Optical and Magnetic Materials
Link
http://xplorestaging.ieee.org/ielx7/5503870/8356075/08307763.pdf?arnumber=8307763
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