Wafer defect patterns recognition based on OPTICS and multi-label classification

Author:

Mengying Fan ,Qin Wang ,van der Waal Ben

Publisher

IEEE

Cited by 55 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Antecedent hash modality learning and representation for enhanced wafer map defect pattern recognition;Expert Systems with Applications;2024-09

2. Recognition and Classification of Mixed Defect Pattern Wafer Map Based on Multi-Path DCNN;IEEE Transactions on Semiconductor Manufacturing;2024-08

3. Generalized zero-shot learning for classifying unseen wafer map patterns;Engineering Applications of Artificial Intelligence;2024-07

4. Implementation of Silicon Wafer Defect Classification Web application using Deep Learning;2024 International Conference on Advancements in Power, Communication and Intelligent Systems (APCI);2024-06-21

5. WaferCap: Open Classification of Wafer Map Patterns using Deep Capsule Network;2024 IEEE 42nd VLSI Test Symposium (VTS);2024-04-22

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