Antecedent hash modality learning and representation for enhanced wafer map defect pattern recognition

Author:

Piao MinghaoORCID,Jin Cheng HaoORCID,Zhong BaojiangORCID

Funder

Priority Academic Program Development of Jiangsu Higher Education Institutions

Natural Science Research of Jiangsu Higher Education Institutions of China

Publisher

Elsevier BV

Reference55 articles.

1. An improved capsule network (WaferCaps) for wafer bin map classification based on DCGAN data upsampling;Abd Al Rahman;IEEE Transactions on Semiconductor Manufacturing,2021

2. Simplified subspaced regression network for identification of defect patterns in semiconductor wafer maps;Adly;IEEE Transactions on Industrial Informatics,2015

3. Randomized general regression network for identification of defect patterns in semiconductor wafer maps;Adly;IEEE Transactions on Semiconductor Manufacturing,2015

4. Laplacian eigenmaps for dimensionality reduction and data representation;Belkin;Neural Computation,2003

5. Improved U-net with residual attention block for mixed-defect wafer maps;Cha;Applied Sciences,2022

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