Process Design Kit and Initial Demonstration of Digital Metal-Embedded Chip Assembly for High Density IO Fan-Out Packaging
Author:
Affiliation:
1. HRL Laboratories, LLC,Malibu,CA,90265
2. The Air Force Research Laboratory,OH,45433
3. Cadence Design Systems, Inc,San Jose,CA,95134
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10195193/10195244/10195363.pdf?arnumber=10195363
Reference7 articles.
1. 10μm Pitch Bumping of Singulated Die Using a Temporary Metal-Embedded Chip Assembly Process
2. Scaling M-Series™ for Chiplets
3. TSV based silicon interposer technology for wafer level fabrication of 3D SiP modules
4. Heterogeneous Integration Technologies for Next-Generation RF and mm-Wave Subsystems;herrault;Proc CS MANTECH Conf,0
5. Alumina Passives Using the Interconnect Layer of Metal-Embedded Chip Assembly Processing
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