High-Performance N79 Band AlScN BAW Resonator and Filter With the Consideration of Area Effect-Reference-Cited by-同舟云学术

High-Performance N79 Band AlScN BAW Resonator and Filter With the Consideration of Area Effect

Published:2023-11 Issue:11 Volume:70 Page:5839-5844
ISSN:0018-9383
Container-title:IEEE Transactions on Electron Devices
language:
Short-container-title:IEEE Trans. Electron Devices

Author:

Ding Rui¹^ORCID,Xuan Weipeng²^ORCID,Gao Feng¹,Cao Tengbo¹,Jin Hao¹^ORCID,Luo Jikui¹^ORCID,Ma Fei³,Dong Shurong¹^ORCID

Affiliation:

1. Key Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, China

2. Ministry of Education Key Laboratory of RF Circuits and Systems, College of Electronics and Information, Hangzhou Dianzi University, Hangzhou, China

3. ZJU-Hangzhou Global Scientific and Technological Innovation Center, Hangzhou, China

Funder

National Key Research and Development Program of China

NSFC Zhejiang Joint Fund for the Integration of Industrialization and Information

Zhejiang Province Key Research and Development Programs

Key Research Project of Zhejiang

Zhejiang University Education Foundation Global Partnership Fund

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/16/10294316/10250884.pdf?arnumber=10250884

Reference21 articles.

1. Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators

2. Piezoelectric coefficients and spontaneous polarization of ScAlN

3. Aluminum scandium nitride thin-film bulk acoustic resonators for wide band applications

4. Effect of size and shape on the performances of BAW resonators: A model and its applications

5. Single crystal AlScN-on-silicon XBAW RF filter technology for wide bandwidth, high frequency 5G and WiFi applications;shealy;Proc CS MANTECH Conf,2022

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