Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators-Reference-Cited by-同舟云学术

Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators

Published:2019-08-21 Issue:7 Volume:126 Page:075106
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Kurz Nicolas¹^ORCID,Ding Anli²,Urban Daniel F.³^ORCID,Lu Yuan²^ORCID,Kirste Lutz²^ORCID,Feil Niclas M.¹,Žukauskaitė Agnė²^ORCID,Ambacher Oliver¹²

Affiliation:

1. Laboratory for Power Electronics, INATECH—Department of Sustainable Systems Engineering, University of Freiburg, Emmy-Noether-Straße 2, 79110 Freiburg, Germany

2. Fraunhofer Institute for Applied Solid State Physics, Tullastrasse 72, 79108 Freiburg, Germany

3. Fraunhofer Institute for Mechanics of Materials IWM, Wöhlerstrasse 11, 79108 Freiburg, Germany

Funder

COMET K1 centre ASSIC

FhG Internal Programs

Deutsche Forschungsgemeinschaft

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5094611

Reference36 articles.

1. Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

2. Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films

3. Increased electromechanical coupling in w−ScxAl1−xN

4. Elastic constants and critical thicknesses of ScGaN and ScAlN

5. Origin of the Anomalous Piezoelectric Response in WurtziteScxAl1−xNAlloys

Cited by 67 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Comprehensive empirical modeling of ScAlN/AlGaN/GaN ferroelectric HEMT;Semiconductor Science and Technology;2024-06-06

2. Piezoelectric and elastic properties of Al0.60Sc0.40N thin films deposited on patterned metal electrodes;Journal of Vacuum Science & Technology A;2024-05-15

3. Intramodal and Intermodal Modulations in Exposed Silicon Waveguides with Surface Acoustic Waves Excited by Aluminum Scandium Nitride Films;ACS Photonics;2024-04-26

4. Improved crystallographic order of ScAlN/GaN heterostructures grown at low temperatures under metal rich surface conditions;Journal of Applied Physics;2024-04-01

5. Perspectives and progress on wurtzite ferroelectrics: Synthesis, characterization, theory, and device applications;Applied Physics Letters;2024-02-19