High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure-Reference-Cited by-同舟云学术

High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure

Published:2023-11-11 Issue:11 Volume:14 Page:2086
ISSN:2072-666X
Container-title:Micromachines
language:en
Short-container-title:Micromachines

Author:

Zhang Zhiheng¹,Xuan Weipeng¹^ORCID,Jiang Hong¹,Xie Weilun¹,Li Zhaoling¹,Dong Shurong²^ORCID,Jin Hao²^ORCID,Luo Jikui¹²^ORCID

Affiliation:

1. Ministry of Education Key Laboratory of RF Circuits and Systems, College of Electronics & Information, Hangzhou Dianzi University, Hangzhou 310005, China

2. Key Laboratory of Advanced Micro/Nano Electronic Devices & Smart Systems of Zhejiang, College of Information Science & Electronic Engineering, Zhejiang University, Hangzhou 310027, China

Abstract

In this work, a longitudinally excited shear-wave resonator (YBAR) based on single-crystalline lithium tantalate (LiTaO3, LT) thin film is proposed. The YBAR has a 200 nm X-cut thin film and molybdenum electrode. A high effective electromechanical coupling coefficient (k2eff) of up to 19% for the suspension-type structure was obtained. Furthermore, a Bragg reflector (SiO2/Pt) with optimized layer thickness ratio was employed to improve the performance of the YBAR. Compared to the acoustic wave resonators with the conventional quarter-wave (λ/4) Bragg reflector, the proposed YBAR with an optimized Bragg reflector can reflect both the longitudinal and shear waves efficiently, and resonators with spurious-free response and high quality (Q) value were achieved. This work provides a potential solution to enabling high coupling micro-acoustic resonators with high Q factor in the 5G/6G communication system.

Funder

National Key R&D Program of China

Zhejiang Province Key R & D programs

National Natural Science Foundation of China

NSFC-Zhejiang Joint Fund for the Integration of Industrialization and information

Zhejiang Province high level talent special support plan

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering

Link

https://www.mdpi.com/2072-666X/14/11/2086/pdf

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