Advanced 200-mm RF SOI Technology exhibiting $78\ \text{fs}\ \mathrm{R}_{\text{ON}}\times \mathrm{C}_{\text{OFF}}$ and 3.7 V breakdown voltage targeting sub 6 GHz 5G FEM

Author:

Gianesello F.1,Fleury A.1,Julien F.1,Dura J.1,Monfray S.1,Dhar S.1,Legrand C.A.1,Amouroux J.1,Gros B.1,Welter L.1,Charbuillet C.1,Cathelin P.1,Canderle E.1,Vulliet N.1,Escolier E.1,Antunes L.1,Granger E.1,Fornara P.1,Rivero C.1,Bertrand G.1,Chevalier P.1,Regnier A.1,Gloria D.1

Affiliation:

1. STMicroelectronics,France

Publisher

IEEE

Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. A Tale of Two Phases: An Overview of Phase-Change Material RF Switch Technology: Sub-20-fs RON*COFF RF Switch Technology for the Mm-Wave and 5G/6G Revolutions;IEEE Microwave Magazine;2024-08

2. Analysis of Airgaps for OFF-State Capacitance Reduction in SOI-CMOS RF Switches;IEEE Transactions on Electron Devices;2023-11

3. Notched gate MOSFET for capacitance reduction in RF SOI technology;2023 IEEE International Conference on Design, Test and Technology of Integrated Systems (DTTIS);2023-11-01

4. RF Performance of Large Germanium Telluride Switches for Power Application;2023 18th European Microwave Integrated Circuits Conference (EuMIC);2023-09-18

5. Improving off-state capacitance of SOI-CMOS RF switches: how good are air microcavities?;ESSDERC 2023 - IEEE 53rd European Solid-State Device Research Conference (ESSDERC);2023-09-11

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