Author:
Torres J. Andres,Kissiov Ivan,Essam Mohamed,Hartig Carsten,Gardner Richard,Jantzen Ken,Schueler Stefan,Niehoff Martin
Cited by
3 articles.
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1. Automotive Process Reliability Prediction for 5,7nm using ML;2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2023-05-01
2. AI-guided reliability diagnosis for 5,7nm automotive process;Metrology, Inspection, and Process Control XXXVII;2023-04-27
3. Reliability Prediction for Automotive 5nm and 7nm Technology node by using Machine Learning based Solution;2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM);2023-03-07