200–330-GHz Substrate-Integrated Waveguide in BEOL of a SiGe BiCMOS Process
Author:
Affiliation:
1. Institute of Radio Frequency Engineering and Electronics, Karlsruhe Institute of Technology, Karlsruhe, Germany
2. IHP Technology, Frankfurt, Germany
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Link
http://xplorestaging.ieee.org/ielx7/9944983/10239679/10155291.pdf?arnumber=10155291
Reference22 articles.
1. Millimeter-wave and terahertz transmission loss of CMOS process-based substrate integrated waveguide
2. Silicon based THz antenna and filter with MEMS process
3. Substrate Integrated Waveguides for mm-wave Functionalized Silicon Interposer
4. A mmWave Folded Substrate Integrated Waveguide in a 130-nm CMOS Process
5. Design Consideration and Performance Analysis of Substrate Integrated Waveguide Components
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2. Sub-THz Substrate Integrated Waveguide Signal Transitions in Backend-of-Line of a Silicon Process;2024 18th European Conference on Antennas and Propagation (EuCAP);2024-03-17
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