Mode-Matched Multi-Ring Disk Resonator Using Single Crystal (100) Silicon
Author:
Funder
New Energy and Industrial Technology Development Organization (NEDO)
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9430449/9430450/09430467.pdf?arnumber=9430467
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Quadrature Error Correction System for Disk Ring Gyroscope Using (100) Single Crystal Silicon;2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS);2024-05-02
2. High Q-Factor and Mode-Matching Disk Ring Gyroscope Using (100) Single Crystal Silicon;2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL);2024-03-25
3. A High-Symmetry Cobweb-Like Disk Ring Gyroscope Utilizing Rhomboid Spoke;2023 2nd International Conference on Optical Imaging and Measurement (ICOIM);2023-10-20
4. Virtual Coriolis-Force-Based Mode-Matching Micromachine-Optimized Tuning Fork Gyroscope without a Quadrature-Nulling Loop;Micromachines;2023-08-31
5. Mode-Matched Multi-Ring Disk Resonator Using (100) Single Crystal Silicon;2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS);2022-01-09
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