Mode-Matched Multi-Ring Disk Resonator Using (100) Single Crystal Silicon
Author:
Affiliation:
1. Tohoku University,JAPAN
Funder
New Energy and Industrial Technology Development Organization (NEDO)
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699445.pdf?arnumber=9699445
Reference12 articles.
1. NEAR-NAVIGATION GRADE QUAD MASS GYROSCOPE WITH Q-FACTOR LIMITED BY THERMO-ELASTIC DAMPING
2. Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam
3. Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon
4. Dual Foucault Pendulum gyroscope
5. Geometrical compensation for mode-matching of a (100) silicon ring resonator for a vibratory gyroscope
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1. Challenges in Implementing Pitch/Roll Rate Integrating Gyroscopes: A Case Study on a New Dynamically Balanced Dual-Mass Resonator;IEEE Sensors Journal;2023-11-15
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3. Virtually Rotated Multiple Mass Resonator Enabled by Electrostatic Frequency and Q-factor Tuning;2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL);2023-03-28
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