Geometrical compensation for mode-matching of a (100) silicon ring resonator for a vibratory gyroscope
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
https://iopscience.iop.org/article/10.7567/1347-4065/ab0dee/pdf
Reference32 articles.
1. Micromachined inertial sensors
2. A HARPSS polysilicon vibrating ring gyroscope
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