High Q-Factor and Mode-Matching Disk Ring Gyroscope Using (100) Single Crystal Silicon-Reference-Cited by-同舟云学术

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High Q-Factor and Mode-Matching Disk Ring Gyroscope Using (100) Single Crystal Silicon

Published:2024-03-25 Issue: Volume: Page:1-4
ISSN:
Container-title:2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
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Author:

Wang Tiantian¹,Wang Congchen¹,Yang Junying¹,Chen Jianlin¹,Chen Fang²,Wu Tao³,Wang Nan¹

Affiliation:

1. Shanghai University,School of Microelectronics,Shanghai,China

2. Chinese Academy of Sciences,Shanghai Institute of Microsystem and Information Technology,Shanghai,China

3. ShanghaiTech University,Shanghaitech Microsystem and Novel Transducers Laboratory,Shanghai,China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10502028/10502030/10502052.pdf?arnumber=10502052

Reference7 articles.

1. Mode-Matched Multi-Ring Disk Resonator Using Single Crystal (100) Silicon

2. Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope

3. Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon

4. Geometric compensation of (100) single crystal silicon disk resonating gyroscope for mode-matching

5. Frequency Trimming Method for a Disk Resonator Using Flexural Rigidity

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