Glass Molding for Microstructures
Author:
Affiliation:
1. Southeast University,Key Laboratory of MEMS of the Ministry of Education,Nanjing,China
Funder
National Natural Science Foundation of China
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9787684/9787697/09787759.pdf?arnumber=9787759
Reference12 articles.
1. A novel micromachining technology for structuring borosilicate glass substrates
2. Hot embossing of micro-lens array on bulk metallic glass
3. Preparation of wafer-level glass cavities by a low-cost chemical foaming process (CFP)
4. A Glass-in-Silicon Reflow Process for Three-Dimensional Microsystems
5. Hemispherical glass shell resonators fabricated using Chemical Foaming Process
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