A Low-Voltage Wideband AlN-on-Si Gyroscope With Sub 10-DPH Bias Instability Mode Matched Using Laser Trimming-Reference-Cited by-同舟云学术

A Low-Voltage Wideband AlN-on-Si Gyroscope With Sub 10-DPH Bias Instability Mode Matched Using Laser Trimming

Published:2023-03-28 Issue: Volume: Page:
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Container-title:2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
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Author:

Liu Zhenming¹,Wen Haoran²,Ayazi Farrokh³

Affiliation:

1. Georgia Institute of Technology,Atlanta,USA

2. StethX Microsystems Inc.,Atlanta,USA

3. Georgia Institute of Technology & StethX Microsystems Inc,Atlanta,USA

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10103931/10103798/10104003.pdf?arnumber=10104003

Reference12 articles.

1. Eigenmode operation of piezoelectric resonant gyroscopes

2. A Study of Mode-Matching and Alignment In Piezoelectric Disk Resonator Gyros Via Femtosecond Laser Ablation

3. Research on a Micro Piezoelectric Gyroscope with Concentrated Rocking-Mass

4. Multi-Coefficient eigenmode operation - breaking through 10°/hr open-loop bias Instability in wideband aluminum nitride piezoelectric BAW gyroscopes;liu;Microsyst Nanoeng,0

5. Wafer-level-packaged HARPSS+ MEMS platform: Integration of robust timing and inertial measurement units (TIMU) on a single chip

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