A Study of Mode-Matching and Alignment In Piezoelectric Disk Resonator Gyros Via Femtosecond Laser Ablation-Reference-Cited by-同舟云学术

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A Study of Mode-Matching and Alignment In Piezoelectric Disk Resonator Gyros Via Femtosecond Laser Ablation

Published:2021-01-25 Issue: Volume: Page:
ISSN:
Container-title:2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Liu Zhenming,Daruwalla Anosh,Hamelin Benoit,Ayazi Farrokh

Funder

National Science Foundation

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9375130/9375148/09375162.pdf?arnumber=9375162

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Achieving Mode Detection and Precise Mechanical Trimming of Uncoated Micro Shell Resonator Using Interdigital Electrode;IEEE Sensors Journal;2024-04-15

2. Passive Quadrature Reduction In Vibratory MEMS BAW Gyroscopes;2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL);2024-03-25

3. Frequency Selection in a MEMS Flexural Beam Resonator by Electrostatic Actuation;Journal of Microelectromechanical Systems;2024-02

4. A Review of Eigenmode and Frequency Control in Piezoelectric MEMS Resonators;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2023-10

5. Fully Integrated High-Frequency MEMS and CMOS Inertial Measurement Systems: Taking a Journey from Silicon to Silicon Carbide;2023 IEEE/ION Position, Location and Navigation Symposium (PLANS);2023-04-24

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