Achieving Mode Detection and Precise Mechanical Trimming of Uncoated Micro Shell Resonator Using Interdigital Electrode-Reference-Cited by-同舟云学术

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Achieving Mode Detection and Precise Mechanical Trimming of Uncoated Micro Shell Resonator Using Interdigital Electrode

Published:2024-04-15 Issue:8 Volume:24 Page:12169-12177
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Lu Kun¹^ORCID,Xi Xiang¹^ORCID,Sun Jiangkun¹^ORCID,Shi Yan¹^ORCID,Xiao Dingbang²^ORCID,Wu Xuezhong²

Affiliation:

1. Microsystems Laboratory, College of Intelligence Science, National University of Defense Technology, Changsha, China

2. Microsystems Laboratory, College of Intelligence Science, and Hunan MEMS Research Center, National University of Defense Technology, Changsha, China

Funder

National Natural Science Foundation of China

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx7/7361/10500449/10460418.pdf?arnumber=10460418

Reference30 articles.

1. 0.00016 deg/√hr Angle Random Walk (ARW) and 0.0014 deg/hr Bias Instability (BI) from a 5.2M-Q and 1-cm Precision Shell Integrating (PSI) Gyroscope

2. 1.5-Million Q-Factor Vacuum-Packaged Birdbath Resonator Gyroscope (BRG)

3. High-Q Navigation-Grade Fused-Silica Micro Birdbath Resonator Gyroscope

4. Fabrication of hemispherical fused silica micro-resonator with tailored stiffness and mass distribution

5. Three-Dimensional Spherical Shell Resonator Gyroscope Fabricated Using Wafer-Scale Glassblowing

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