1. Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan
2. Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu, Taiwan
3. Vanguard International Semiconductor Corporation, Hsinchu, Taiwan
4. Vanguard International Semiconductor Corporation Singapore Pte. Ltd, Tampines, Singapore
5. Institute of NanoEngineering and MicroSystems and the Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan