Ferroelectricity in hafnium oxide: CMOS compatible ferroelectric field effect transistors
Author:
Affiliation:
1. Löberwallgraben 2, 99096 Erfurt, Germany
2. Fraunhofer Fraunhofer Center for Nanoelectronic Technology, Dresden, Germany
3. RWTH Aachen, IWE II, Germany
4. Namlab gGmbH, Dresden, Germany
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx5/6123666/6131464/06131606.pdf?arnumber=6131606
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