Impact of FEOL cross-heating on the thermal performance of advanced BEOL-Reference-Cited by-同舟云学术

Impact of FEOL cross-heating on the thermal performance of advanced BEOL

Published:2022-05-31 Issue: Volume: Page:
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Container-title:2022 21st IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (iTherm)
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Author:

Lofrano Melina¹,Vermeersch Bjorn¹,Oprins Herman¹,Park Seongho²,Tokei Zsolt²

Affiliation:

1. Imec,Thermal Modeling and Characterization,Leuven,Belgium

2. Imec,Cohesive Program Management,Leuven,Belgium

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9899435/9899496/09899545.pdf?arnumber=9899545

Reference10 articles.

1. Joule heating investigation for advanced interconnect schemes with airgaps

2. Joule Heating study in scaled Cu, Co and Ru interconnects;lofrano;2019 IEEE International Interconnect Technology Conference (IITC),2019

3. Experimental Characterization of the Vertical and Lateral Heat Transfer in 3D-SIC Packages;oprins;Proceedings of the ASME 2015 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems collocated with the ASME 2015 13th International Conference on Nanochannels Microchannels and Minichannels Volume 1 Thermal Management,2015

4. Reliability of a DME Ru Semidamascene scheme with 16nm wide Airgaps;lesniewska;IEEE International Reliability Physics Symposium (IRPS),2021

5. Reliability study on cobalt and ruthenium as alternative metals for advanced interconnects

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1. Towards accurate temperature prediction in BEOL for reliability assessment (Invited);2023 IEEE International Reliability Physics Symposium (IRPS);2023-03