Reliability study on cobalt and ruthenium as alternative metals for advanced interconnects-Reference-Cited by-同舟云学术

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Reliability study on cobalt and ruthenium as alternative metals for advanced interconnects

Published:2017-04 Issue: Volume: Page:
ISSN:
Container-title:2017 IEEE International Reliability Physics Symposium (IRPS)
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Author:

Pedreira O. Varela,Croes K.,Lesniewska A.,Wu C.,van der Veen M. H.,de Messemaeker J.,Vandersmissen K.,Jourdan N.,Wen L.G.,Adelmann C.,Briggs B.,Gonzalez V. Vega,Bommels J.,Tokei Zs.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/7932684/7936242/07936340.pdf?arnumber=7936340

Cited by 42 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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3. Reliability Investigation of Cobalt and Copper Damascene Interconnects with Capped Graphene;2024 International Conference on Electronics Packaging (ICEP);2024-04-17

4. Graphene-All-Around Cobalt Interconnect with a Back-End-of-Line Compatible Process;Nano Letters;2024-01-31

5. Insight Into Electromigration Reliability of Buried Power Rail With Alternative Metal Material;IEEE Transactions on Electron Devices;2024-01

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