Spectroscopic ellipsometry study of parylene AF4
Author:
Affiliation:
1. Sensor System Division, Silicon Austria Labs GmbH,Villach,Austria
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9812704/9812706/09812819.pdf?arnumber=9812819
Reference12 articles.
1. A combined X-ray, ellipsometry and atomic force microscopy study on thin parylene-C films
2. Parylene-AF4: a polymer with exceptional dielectric and thermal properties
3. An infrared dielectric function model for amorphous solids
4. Downstream oxygen etching characteristics of polymers from the parylene family
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1. Evaluation of Optical Interferometry for Thickness Uniformity Control of Parylene HT Coating on Titanium Substrates;2024 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP);2024-06-02
2. Soft mask-based dry etching of parylene AF4 for advanced packaging applications;2022 IEEE 24th Electronics Packaging Technology Conference (EPTC);2022-12-07
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