MEMS Shutter Based Variable Optical Attenuator Integrated With Large Core Multimode Rectangular Waveguides-Reference-Cited by-同舟云学术

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MEMS Shutter Based Variable Optical Attenuator Integrated With Large Core Multimode Rectangular Waveguides

Published:2021-01-25 Issue: Volume: Page:
ISSN:
Container-title:2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
language:
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Author:

Lagosh Anton,Guldimann Benedikt,Huszka Gergely,Sattari Hamed,Ahlers Berit,Kerr Gregoire,Melozzi Mauro,Rahnama Peyman,Nishizawa Takeshi,Quack Niels

Funder

European Space Agency

National Science Foundation

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9375130/9375148/09375396.pdf?arnumber=9375396

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Advancing simulation efficiency for MEMS electrostatic actuators;Journal of Physics: Conference Series;2024-04-01

2. Compactly integrated polarization insensitive 24-channel variable optical attenuator arrays using silica-based;Optics Communications;2023-12

3. Demonstration of Heterogeneous Structure for Fabricating a Comb-Drive Actuator for Cryogenic Applications;Micromachines;2022-08-11

4. Multichannel Smart Slit Assembly for Spectroscopy Based on Arrays of Variable Optical MEMS Attenuators;2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS);2022-01-09

5. Smart slit assembly employing continuously tunable MEMS shutter;MOEMS and Miniaturized Systems XX;2021-03-05

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