Advancing simulation efficiency for MEMS electrostatic actuators

Abstract

Abstract This paper presents an overview of the research progress on Multiphysics simulation of MEMS electrostatic actuators. MEMS electrostatic actuators have shown significant development potential in applications such as ADWSS and VOA. However, the increasing size and complexity of these devices have posed challenges to traditional Multiphysics simulation methods, leading to lengthy computational times that hinder the overall device development process. In order to enhance simulation efficiency and meet the demands of device development, the use of simplified single physics field models have been explored. The results have demonstrated that the simplified single physics filed simulation model yields comparable results to traditional Multiphysics simulations with an error tolerance of within 10%, while reducing simulation time by 80-90%.