Multichannel Smart Slit Assembly for Spectroscopy Based on Arrays of Variable Optical MEMS Attenuators-Reference-Cited by-同舟云学术

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Multichannel Smart Slit Assembly for Spectroscopy Based on Arrays of Variable Optical MEMS Attenuators

Published:2022-01-09 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
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Author:

Lagosh Anton¹,Guldimann Benedikt¹,Giaccari Philippe²,Kerr Gregoire²,Nishizawa Takeshi³,Ahlers Berit³,Rahnama Peyman⁴,Quack Niels⁴

Affiliation:

1. Ecole Polytechnique Fédérale de Lausanne,Lausanne,SWITZERLAND,1015

2. European Space Research and Technology Centre,Noordwijk,NETHERLANDS,2201 AZ

3. Micos Engineering,Dübendorf,SWITZERLAND,8600

4. OHB System AG,Wessling,GERMANY,82234

Funder

European Space Agency

Swiss National Science Foundation

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699546.pdf?arnumber=9699546

Reference5 articles.

1. Smart slit assembly employing continuously tunable MEMS shutter

2. MEMS Shutter Based Variable Optical Attenuator Integrated With Large Core Multimode Rectangular Waveguides

3. Sidewall Metallization on CMOS MEMS by Platinum ALD Patterning

4. Smart Slit Assembly for High-Resolution Spectrometers in Space;guldimann;Proc SPIE 9754 Photonic Instrumentation Engineering III,0

5. The European CO2 Monitoring Mission: observing anthropogenic greenhouse gas emissions from space

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