3<sup>rd</sup> type of FBARs?-Reference-Cited by-同舟云学术

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3^rd type of FBARs?

Published:2013-07 Issue: Volume: Page:
ISSN:
Container-title:2013 IEEE International Ultrasonics Symposium (IUS)
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Author:

Plessky Victor,Ballandras Sylvain,Grigorievsky Valery,Yantchev Ventsislav

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/6708499/6724747/06725002.pdf?arnumber=6725002

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression;Journal of Microelectromechanical Systems;2023-08

2. Vertical etching of Al_0.7Sc_0.3N for next generation of acoustic wave resonators;2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP);2023-05-28

3. Fabrication and characterization of hybrid bulk and surface acoustic wave resonators with Ag/patterned-AlN/Mo/diamond/Si layered structure;Diamond and Related Materials;2023-04

4. High Quality Factor Hybrid SAW/BAW Resonators;2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS);2022-04-24

5. Investigation of Effect of SiO2 Buffer Layer on the Characteristics of Surface Waves Excited in Patterned-ZnO/SiO2/Si Structure on Silicon Substrate;Silicon;2021-10-21

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