An Opto-mechanical MEMS Accelerometer with Noise Floor of 40 ng/Hz<sup>1/2</sup>-Reference-Cited by-同舟云学术

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An Opto-mechanical MEMS Accelerometer with Noise Floor of 40 ng/Hz^1/2

Published:2023-05-14 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
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Author:

Jiao Shimin¹,Ouyang Hao¹,Qu Ziqiang¹,Wang Qiu¹,Liu Huafeng¹,Tu Liang-Cheng²

Affiliation:

1. Huazhong University of Science and Technology,PGMF and School of Physics,Wuhan,China

2. Sun Yat-sen University,TianQin Research Center for Gravitational Physics and School of Physics and Astronomy,Zhuhai,China

Funder

Research and Development

National Natural Science Foundation of China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10190845/10190847/10190865.pdf?arnumber=10190865

Reference18 articles.

1. Observation of Gravitational Waves from a Binary Black Hole Merger;abbott;Phys Rev Lett,2016

2. A high-resolution microchip optomechanical accelerometer

3. Broadband thermomechanically limited sensing with an optomechanical accelerometer

4. High-Sensitivity Optical Monitoring of a Micromechanical Resonator with a Quantum-Limited Optomechanical Sensor

5. Acoustical Response Characteristics of an Optomechanical Accelerometer

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optical Interferometric MEMS Accelerometers;Laser & Photonics Reviews;2023-12-02

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