Author:
Madugani Ramgopal,Zhou Feng,Wagner Randall P,Bao Yiliang,Gorman Jason J,LeBrun Thomas W
Cited by
1 articles.
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1. An Opto-mechanical MEMS Accelerometer with Noise Floor of 40 ng/Hz1/2;2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS);2023-05-14