Trilayer Periodically Poled Piezoelectric Film Lithium Niobate Resonator-Reference-Cited by-同舟云学术

Trilayer Periodically Poled Piezoelectric Film Lithium Niobate Resonator

Published:2023-09-03 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE International Ultrasonics Symposium (IUS)
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Author:

Kramer Jack¹,Huynh Kenny²,Tetro Ryan³,Matto Lezli²,Barrera Omar¹,Chulukhadze Vakhtang¹,Cho Sinwoo¹,Luccioni Dorian²,Colombo Luca³,Goorsky Mark²,Lu Ruochen¹

Affiliation:

1. The University of Texas at Austin,Department of Electrical and Computer Engineering,Austin,Texas,USA

2. University of California Los Angeles,Department of Electrical and Computer Engineering,Los Angeles,CA,USA

3. Northeastern University,Department of Electrical and Computer Engineering,Boston,MA,USA

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10306337/10306342/10306831.pdf?arnumber=10306831

Reference32 articles.

1. Frequency Scaling Millimeter Wave Acoustic Resonators using Ion Beam Trimmed Lithium Niobate

2. Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBW

3. A Manufacturable AlScN Periodically Polarized Piezoelectric Film Bulk Acoustic Wave Resonator (AlScN P3F BAW) Operating in Overtone Mode at X and Ku Band

4. A mm-Wave Trilayer AlN/ScAlN/AlN Higher Order Mode FBAR

5. Low loss, 3.7GHz wideband BAW filters, using high power single crystal AlN-on-SiC resonators

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1. Piezoelectrically and Capacitively Transduced Hybrid MEMS Resonator with Superior RF Performance and Enhanced Parasitic Mitigation by Low-Temperature Batch Fabrication;Applied Sciences;2024-09-11

2. A 56 GHz Trilayer AlN/ScAlN/AlN Periodically Poled FBAR;2024 IEEE/MTT-S International Microwave Symposium - IMS 2024;2024-06-16

3. Thin-Film Lithium Niobate on Insulator Surface Acoustic Wave Devices for 6G Centimeter Bands;2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM);2024-05-13

4. 2–16 GHz Multifrequency X-Cut Lithium Niobate NEMS Resonators on a Single Chip;2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS);2024-05-02

5. 23.8-GHz Acoustic Filter in Periodically Poled Piezoelectric Film Lithium Niobate With 1.52-dB IL and 19.4% FBW;IEEE Microwave and Wireless Technology Letters;2024-04