A Manufacturable AlScN Periodically Polarized Piezoelectric Film Bulk Acoustic Wave Resonator (AlScN P3F BAW) Operating in Overtone Mode at X and Ku Band-Reference-Cited by-同舟云学术

A Manufacturable AlScN Periodically Polarized Piezoelectric Film Bulk Acoustic Wave Resonator (AlScN P3F BAW) Operating in Overtone Mode at X and Ku Band

Published:2023-06-11 Issue: Volume: Page:
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Container-title:2023 IEEE/MTT-S International Microwave Symposium - IMS 2023
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Author:

Vetury Ramakrishna¹,Kochhar Abhay¹,Leathersich Jeff¹,Moe Craig¹,Winters Mary¹,Shealy Jeffrey¹,Olsson Roy H.²

Affiliation:

1. Akoustis Technologies, Inc.,USA

2. University of Pennsylvania,Department of Electrical and Systems Engineering,USA

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10187888/10187785/10188141.pdf?arnumber=10188141

Reference26 articles.

1. Highly Doped AlScN 3.5 GHz XBAW Resonators with 16% k2eff for 5G RF Filter Applications

2. 12E-2 X-Band Filters Utilizing AlN Thin Film Bulk Acoustic Resonators

3. Controlling Residual Stress and Suppression of Anomalous Grains in Aluminum Scandium Nitride Films Grown Directly on Silicon

4. Digital Phased Arrays: Challenges and Opportunities

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