Research on the two-dimensional polynomial fitting method of piezoresistive differential pressure transducer-Reference-Cited by-同舟云学术

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Research on the two-dimensional polynomial fitting method of piezoresistive differential pressure transducer

Published:2024-05-02 Issue: Volume: Page:1-4
ISSN:
Container-title:2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
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Author:

Yang Yang¹,Jin Yufeng¹,Shi Guangyi²,Wang Yuan³

Affiliation:

1. Shenzhen Graduate School of Peking University,School of Electronic and Computer Engineering,Shenzhen,China

2. Peking University,School of Software and Microelectronics,Beijing,China

3. University of Electronic Science and Technology of China,Chengdu,China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx8/10639541/10639542/10639553.pdf?arnumber=10639553

Reference12 articles.

1. Theory, technology and applications of piezoresistive sensors: A review

2. Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging

3. Optimizing Piezoresistive MEMS Pressure Sensor on a Double Cross Beam Silicon Diaphragm With Statistical Curve-Fitting and Optimization Techniques

4. Investigation of Potting-Adhesive-Induced Thermal Stress in MEMS Pressure Sensor

5. Modelling Impact of Viscoelastic Properties of Die-Attach Material on the Bias Response of Resonant Inertial Sensors

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