Modelling Impact of Viscoelastic Properties of Die-Attach Material on the Bias Response of Resonant Inertial Sensors-Reference-Cited by-同舟云学术

Modelling Impact of Viscoelastic Properties of Die-Attach Material on the Bias Response of Resonant Inertial Sensors

Published:2023-01-15 Issue: Volume: Page:
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Container-title:2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Miani Theo¹,Gurung Lokesh¹,Sobreviela-Falces Guillermo¹,Young Douglas¹,Baker Colin¹,Seshia Ashwin A.²

Affiliation:

1. Silicon Microgravity Ltd.,Cambridge,UK

2. University of Cambridge,Nanoscience Centre,Department of Engineering,UK

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052540.pdf?arnumber=10052540

Reference11 articles.

1. MEMS gyros temperature calibration through artificial neural networks

2. Characterization of Viscoelasticity of Molding Compounds in Time Domain

3. Material Viscoelasticity-Induced Drift of Micro-Accelerometers

4. A Low-Noise Mixed Signal ASIC for Navigation-Grade Resonant MEMS Accelerometer

5. A Mems Vibrating Beam Accelerometer for High Resolution Seismometry and Gravimetry;2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS),2021

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