A MEMS Spiral Power Inductor with A Magnetic Core for DC-DC Converters-Reference-Cited by-同舟云学术

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A MEMS Spiral Power Inductor with A Magnetic Core for DC-DC Converters

Published:2024-05-02 Issue: Volume: Page:1-4
ISSN:
Container-title:2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
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Author:

Shan Chongshu¹,Li Zilin¹,Yang Hengzhang¹,Yan Yangyang²,Kang Bingyin³,Xie Huikai¹

Affiliation:

1. School of Integrated Circuits and Electronics, Beijing Institute of Technology,Beijing,China,100081

2. BIT Chongqing Institute of Microelectronics and Microsystems,Chongqing,China,400030

3. The 24th Research Institute of China Electronics Technology Group Corp.,Chongqing,China,400060

Funder

National Natural Science Foundation of China

National Science and Technology Planning Project

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx8/10639541/10639542/10639834.pdf?arnumber=10639834

Reference7 articles.

1. A High-Q In-Silicon Power Inductor Designed for Wafer-Level Integration of Compact DC–DC Converters

2. Manufacture and Characterization of High Q-Factor Inductors Based on CMOS-MEMS Techniques

3. Microfabricated Racetrack Inductors With Thin-Film Magnetic Cores for On-Chip Power Conversion

4. A Surface-Mountable Microfabricated Power Inductor in Silicon for Ultracompact Power Supplies

5. Multi-chip Stacking with Fine Pitch μbumps and TSVs for Heterogeneous Integration

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