Estimating the Sensitivity of Microoptoelectromechanical Micro-g Accelerometer
Author:
Affiliation:
1. The Tomsk State University of Control Systems and Radioelectronics,Laboratory of Radiophotonics,Tomsk,Russia
Funder
Russian Academy of Sciences
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9855012/9854868/09855054.pdf?arnumber=9855054
Reference18 articles.
1. Design and Demonstration of an In-Plane Silicon-on-Insulator Optical MEMS Fabry–Pérot-Based Accelerometer Integrated With Channel Waveguides
2. A high-resolution microchip optomechanical accelerometer
3. An Optical MEMS Accelerometer Based on a Two-Dimensional Photonic Crystal Add-Drop Filter
4. Micro-optoelectromechanical systems accelerometer based on intensity modulation using a one-dimensional photonic crystal
5. In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor
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1. The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer;Sensors;2024-01-24
2. Optical Interferometric MEMS Accelerometers;Laser & Photonics Reviews;2023-12-02
3. Optimizing the Structural Parameters of the Mechanical Sensing Element of a Microoptoelectromechanical Micro-g Accelerometer;2023 IEEE 24th International Conference of Young Professionals in Electron Devices and Materials (EDM);2023-06-29
4. An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect;Micromachines;2023-03-31
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