Micro-optoelectromechanical systems accelerometer based on intensity modulation using a one-dimensional photonic crystal
Author:
Publisher
The Optical Society
Reference24 articles.
1. Overview of automotive sensors
2. Microelectromechanical systems (MEMS): fabrication, design and applications
3. MEMS inertial sensors: A tutorial overview
4. Design of an SOI-MEMS high resolution capacitive type single axis accelerometer
5. Vertical comb-finger capacitive actuation and sensing for CMOS-MEMS
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