High Sensitivity Optical MEMS Accelerometer Based on a Metal Fabry–Pérot Microcavities Wavelength Modulation System-Reference-Cited by-同舟云学术

High Sensitivity Optical MEMS Accelerometer Based on a Metal Fabry–Pérot Microcavities Wavelength Modulation System

Author:

Li Guanghui¹^ORCID,Cai Changchun²,Zhang Yan¹,Deng Xiong¹^ORCID,Lin Liangzhong³,Xiao Wenbo⁴

Affiliation:

1. School of Physics and Mechatronic Engineering, Guizhou Minzu University, Guiyang, China

2. School of Aeronautical Manufacturing Engineering, Nanchang Hang Kong University, Nanchang, China

3. School of Information Engineering, Zhongshan Polytechnic, Zhongshan, China

4. College of Science and Technology, Nanchang Hang Kong University, Gongqing City, China

Funder

National Natural Science Foundation of China

13th Batch of Outstanding Young Scientific and Technological Talents Project in Guizhou Province

2022 Jiangxi Province High Level and Skilled Leading Talent Training Project

Jiangxi Provincial Department of Education Science and Technology Key Project

Jiujiang City Municipal Science and Technology Plan Project

Scientific Research Funded Project of Guizhou Minzu University

College Innovation Project of Guangdong Province

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

Reference64 articles.

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