Optimizing the Structural Parameters of the Mechanical Sensing Element of a Microoptoelectromechanical Micro-g Accelerometer-Reference-Cited by-同舟云学术

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Optimizing the Structural Parameters of the Mechanical Sensing Element of a Microoptoelectromechanical Micro-g Accelerometer

Published:2023-06-29 Issue: Volume: Page:
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Container-title:2023 IEEE 24th International Conference of Young Professionals in Electron Devices and Materials (EDM)
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Author:

Barbin Evgenij S.¹,Nesterenko Tamara G.²,Koleda Aleksei N.²,Shesterikov Evgeniy V.¹,Kulinich Ivan V.¹,Kokolov Andrey A.¹

Affiliation:

1. Institute of Optics and Atmosphere, Siberian Branch of the Russian Academy of Sciences,Laboratory of Radiophotonics, The Tomsk State University of Control Systems and Radioelectronics. Laboratory of Intelligent Computer Systems,Tomsk,Russia

2. The Tomsk State University of Control Systems and Radioelectronics,Laboratory of Radiophotonics,Tomsk,Russia

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10224902/10225012/10225059.pdf?arnumber=10225059

Reference21 articles.

1. Design and Modeling of Fiber-Free Optical MEMS Accelerometer Enabling 3D Measurements

2. Design and Demonstration of an In-Plane Silicon-on-Insulator Optical MEMS Fabry–Pérot-Based Accelerometer Integrated With Channel Waveguides

3. Design of Out-of-Plane MOEMS Accelerometer With Subwavelength Gratings

4. An Optical MEMS Accelerometer Based on a Two-Dimensional Photonic Crystal Add-Drop Filter

5. Estimating the Sensitivity of Microoptoelectromechanical Micro-g Accelerometer

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