A Time-of-Flight (ToF) estimation algorithm for ranging using Silicon-On-Nothing pMUTs
Author:
Affiliation:
1. Institute of Microelectronics (IME),Agency for Science, Technology and Research (A *STAR),Singapore
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9957114/9957143/09957846.pdf?arnumber=9957846
Reference13 articles.
1. AlN-based piezoelectric micromachined ultrasonic transducer for photoacoustic imaging
2. Silicon-On-Nothing ScAlN pMUTs
3. Piezoelectric over Silicon-on-Nothing (pSON) process
4. Non-Contact Surface Temperature Sensing Based on a Single Bimorph pMUTs Array
5. In-Air Rangefinding With an AlN Piezoelectric Micromachined Ultrasound Transducer
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1. DC Bias Effects on Optimizing ScAlN Air-Coupled pMUT Performance Parameters;2023 IEEE SENSORS;2023-10-29
2. Long-Range High-Resolution Imaging With Silicon-on-Nothing ScAlN pMUTs;IEEE Sensors Journal;2023-10-15
3. DC-Bias Effects on Sputtered PZT pMUTs with High Transmit and Receive Sensitivities in Immersion for Imaging applications;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03
4. A Feasibility Study on Underwater 2D Localization Using PZT pMUTs;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03
5. Piezoelectric MEMS for Frequency Control and Sensing;2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS);2023-05-15
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