Long-Range High-Resolution Imaging With Silicon-on-Nothing ScAlN pMUTs
Author:
Affiliation:
1. Institute of Microelectronics (IME), A*STAR, Fusionopolis, Singapore
Funder
A*STAR under the “Piezo Specialty Laboratory-in-a-Fab”
“Nanosystems at the Edge” Program
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/10286142/10220102.pdf?arnumber=10220102
Reference26 articles.
1. Pulse-Echo Ultrasound Imaging Using an AlN Piezoelectric Micromachined Ultrasonic Transducer Array With Transmit Beam-Forming
2. Fabrication of a two-dimensional piezoelectric micromachined ultrasonic transducer array using a top-crossover-to-bottom structure and metal bridge connections
3. A CSM/TFM imaging scheme for Silicon-On-Nothing ScAlN pMUT arrays
4. Waveguide piezoelectric micromachined ultrasonic transducer array for short-range pulse-echo imaging
5. Broadband piezoelectric micromachined ultrasonic transducers based on dual resonance modes
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