DC Bias Effects on Optimizing ScAlN Air-Coupled pMUT Performance Parameters-Reference-Cited by-同舟云学术

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DC Bias Effects on Optimizing ScAlN Air-Coupled pMUT Performance Parameters

Published:2023-10-29 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE SENSORS
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Author:

Cheong D. S. W.¹,Goh D. J.¹,Liu J.¹,Sarafianou M.¹,Merugu S.¹,Zhang Q. X.¹,Chang P.¹,Leotti A.²,Koppisetti G.²,Zakiyyan N.²,Lin H.¹,Bhasetti C.¹,Ghosh S.¹,Ramegowda P. C.¹,Chen D. S.-H.¹,Lee J. E.-Y.¹,Prelini C.³,Giusti D.³,Savoia A.⁴,K Yul.¹

Affiliation:

1. Institute of Microelectronics, Agency for Science, Technology and Research,Singapore

2. STMicroelectronics,Singapore

3. STMicroelectronics,Italy

4. Roma Tre University,Rome,Italy

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10324456/10324848/10325160.pdf?arnumber=10325160

Reference8 articles.

1. Airborne Piezoelectric Micromachined Ultrasonic Transducers for Long-Range Detection

2. A Time-of-Flight (ToF) estimation algorithm for ranging using Silicon-On-Nothing pMUTs

3. High-SPL Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on 36% ScAlN Thin-Film

4. Correlation of Wafer-scale Film Stress Effects on ScAlN pMUT Parameters

5. 12.1 3D ultrasonic gesture recognition

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