An Optimization Method To Improve Accuracy of the Wavefront Aberration Measurement Technique Based on Principal Component Analysis of Aerial Images-Reference-Cited by-同舟云学术

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An Optimization Method To Improve Accuracy of the Wavefront Aberration Measurement Technique Based on Principal Component Analysis of Aerial Images

Published:2023-10-26 Issue: Volume:59 Page:1-4
ISSN:
Container-title:2023 International Workshop on Advanced Patterning Solutions (IWAPS)
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Author:

Tong Tong¹,Pan Dongchao²,Jiang Yipeng³,Wang Xiangzhao⁴,Li Sikun⁴

Affiliation:

1. School of Microelectronics, Shanghai University, Shanghai; Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences,Shanghai,China

2. Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences; University of Chinese Academy of Science,Shanghai,China

3. Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences; Zhejiang University,Hangzhou,China

4. School of Microelectronics, Shanghai University,Shanghai

Funder

National Natural Science Foundation of China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10365714/10366059/10366099.pdf?arnumber=10366099

Reference9 articles.

1. Evolution and Updates of Advanced Photolithography Technology[J];Li;Laser & Optoelectronics Progress,2022

2. Simplified Analytical Method for Error Sources in Mueller Matrix Imaging Polarimeter

3. Fast thermal aberration model for lithographic projection lenses

4. Aerial image based technique for measurement of lens aberrations up to 37th Zernike coefficient in lithographic tools under partial coherent illumination

5. In situ aberration measurement technique based on principal component analysis of aerial image

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